2 Patents
- US123343322025Remote Plasma Based Deposition of Silicon Carbide Films Using Silicon-containing and Carbon-containing Precursors
Lam Research Corporation
0 cites - US121166692024Integrated Showerhead with Improved Hole Pattern for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites