21 Patents
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- US123343672025Method and Apparatus for Removing Particles or Photoresist on Substrates
ACM RESEARCH (SHANGHAI), Inc.
0 cites - US121866842025Method and Apparatus for Cleaning Substrates Using High Temperature Chemicals and Ultrasonic Device
ACM RESEARCH (SHANGHAI), Inc.
0 cites - US121115752024Coater with Automatic Cleaning Function and Coater Automatic Cleaning Method
ACM RESEARCH (SHANGHAI) Inc.
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- US119258812024Method and Apparatus for Cleaning Substrates Using High Temperature Chemicals and Ultrasonic Device
ACM RESEARCH (SHANGHAI) Inc.
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- US116294252023Method and Apparatus for Uniformly Metallization on Substrate
ACM RESEARCH (SHANGHAI), Inc.
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