Patents/Inventors

Fumiya Takata

MiyagiJP5 patents

5 Patents

US125753512026
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124889902025
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124566262025
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US115943982023
Apparatus and Method for Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US115690942023
Etching Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites