Patents/Inventors

Fumito Kagami

YamanashiJP3 patents

3 Patents

US125575922026
Processing Apparatus and Substrate Transfer Method with First and Second Suction Paths
Tokyo Electron Limited
0 cites
US121069972024
Test Device, Change Kit, and Method of Exchanging Change Kit
Tokyo Electron Limited
0 cites
US118942562024
Substrate Holding Mechanism, Substrate Mounting Method, and Substrate Detaching Method
Tokyo Electron Limited
0 cites