Fumio Iwamoto

3 Patents

• US123325752025

  Target Supply System, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method

  Gigaphoton Inc.

  0 cites
• US121854492024

  EUV Light Generation Apparatus, Electronic Device Manufacturing Method, and Inspection Method

  Gigaphoton Inc.

  0 cites
• US116596462023

  Target Supply Device, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method

  Gigaphoton Inc.

  0 cites