Patents/Inventors

Fuma Kizu

TochigiJP1 patent

2 Patents

US122935052025
Evaluation Apparatus, Computer-readable Storage Medium, Evaluation Method, Forming System, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US119472672024
Method of Obtaining Array of Plurality of Shot Regions on Substrate, Exposure Method, Exposure Apparatus, Method of Manufacturing Article, Non-transitory Computer-readable Storage Medium, and Information Processing Apparatus
CANON KABUSHIKI KAISHA
0 cites