Patents/Inventors

Fufa Chen

ShanghaiCN7 patents

9 Patents

US121115752024
Coater with Automatic Cleaning Function and Coater Automatic Cleaning Method
ACM RESEARCH (SHANGHAI) Inc.
0 cites
US119674972024
Methods and Apparatus for Cleaning Semiconductor Wafers
ACM Research (Shanghai) Inc.
0 cites
US119118072024
Method and Apparatus for Cleaning Substrates
ACM RESEARCH (SHANGHAI), Inc.
0 cites
US119118082024
System for Cleaning Semiconductor Wafers
ACM Research (Shanghai) Inc.
0 cites
US118482172023
Methods and Apparatus for Cleaning Substrates
ACM Research (Shanghai) Inc.
0 cites
US117525292023
Method for Cleaning Semiconductor Wafers
ACM Research (Shanghai) Inc.
0 cites
US116389372023
Methods and Apparatus for Cleaning Substrates
ACM RESEARCH, Inc.
0 cites
US116337652023
System for Cleaning Semiconductor Wafers
ACM Research (Shanghai) Inc.
0 cites
US115812052023
Methods and System for Cleaning Semiconductor Wafers
ACM Research, Inc.
0 cites