Patents/Inventors

Franz Zach

Los Gatos, CAUS4 patents

5 Patents

US124812232025
System and Method for Optimizing Through Silicon via Overlay
KLA Corporation
0 cites
US121971372025
System and Method for Determining Post Bonding Overlay
KLA Corporation
0 cites
US121642772024
System and Method for Mitigating Overlay Distortion Patterns Caused by a Wafer Bonding Tool
KLA Corporation
0 cites
US118290772023
System and Method for Determining Post Bonding Overlay
KLA Corporation
0 cites
US117824112023
System and Method for Mitigating Overlay Distortion Patterns Caused by a Wafer Bonding Tool
KLA Corporation
0 cites