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Frank Pieter Albert Van Den Berkmortel
Deurne
NL
2 patents
3 Patents
US12405539
2025
Substrate Support and Substrate Table
ASML Netherlands B.V.
0 cites
US12249535
2025
Substrate Holder for Use in a Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US11749556
2023
Substrate Holder for Use in a Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites