Patents/Inventors

Frank Loren Pasquale

Tigard, ORUS9 patents

9 Patents

US125989302026
Conformal Thermal CVD with Controlled Film Properties and High Deposition Rate
Lam Research Corporation
0 cites
US124216022025
Multi-station Semiconductor Processing with Independently Adjustable Pedestals
Lam Research Corporation
0 cites
US122917772025
Throughput Improvement with Interval Conditioning Purging
Lam Research Corporation
0 cites
US122701032025
Plasma-enhanced Atomic Layer Deposition with Radio-frequency Power Ramping
Lam Research Corporation
0 cites
US122527822025
In-situ PECVD Cap Layer
Lam Research Corporation
0 cites
US120573002024
Apparatus for Cleaning Plasma Chambers
LAM RESEARCH CORPORATION
0 cites
US119591722024
Substrate Processing Systems Including Gas Delivery System with Reduced Dead Legs
LAM RESEARCH CORPORATION
0 cites
US119591752024
Fill on Demand Ampoule Refill
Lam Research Corporation
0 cites
US116616542023
Substrate Processing Systems Including Gas Delivery System with Reduced Dead Legs
LAM RESEARCH CORPORATION
0 cites