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Inventors
Frank Laske
Weilmunster
DE
3 patents
4 Patents
US12444628
2025
Image Modeling-assisted Contour Extraction
KLA CORPORATION
0 cites
US12092966
2024
Device Feature Specific Edge Placement Error (EPE)
KLA Corporation
0 cites
US12085385
2024
Design-assisted Large Field of View Metrology
KLA Corporation
0 cites
US11637030
2023
Multi-stage, Multi-zone Substrate Positioning Systems
KLA Corporation
0 cites