Filippo Alpeggiani

5 Patents

• US125851982026

  Lithographic Apparatus, Multi-wavelength Phase-modulated Scanning Metrology System and Method

  ASML HOLDING N.V.

  0 cites
• US125720832026

  Intensity Order Difference Based Metrology System, Lithographic Apparatus, and Methods Thereof

  ASML HOLDING N.V.

  0 cites
• US122875912025

  Lithographic Apparatus, Metrology Systems, and Methods Thereof

  ASML Netherlands B.V. & ASML Holding N.V.

  0 cites
• US120259252024

  Metrology Method and Lithographic Apparatuses

  ASML Netherlands B.V.

  0 cites
• US117623052023

  Alignment Method

  ASML Netherlands B.V.

  0 cites