Fernando Hung Low

3 Patents

• US125289732026

  Composition and Method for Silicon Oxide and Carbon Doped Silicon Oxide CMP

  CMC Materials LLC

  0 cites
• US122276732025

  Composition and Method for Silicon Nitride CMP

  CMC MATERIALS LLC

  0 cites
• US118022202023

  Silica-based Slurry for Selective Polishing of Carbon-based Films

  CMC Materials, Inc.

  0 cites