Patents/Inventors

Fengyuan Lai

Sherwood, ORUS11 patents

4 Patents

US126010512026
Oxidation Resistant Protective Layer in Chamber Conditioning
Lam Research Corporation
0 cites
US122278372025
Ex Situ Coating of Chamber Components for Semiconductor Processing
Lam Research Corporation
0 cites
US121632192024
Ex Situ Coating of Chamber Components for Semiconductor Processing
Lam Research Corporation
0 cites
US117610792023
Oxidation Resistant Protective Layer in Chamber Conditioning
Lam Research Corporation
0 cites