Patents/Inventors

Felix Leib Kozakevich

Sunnyvale, CAUS11 patents

12 Patents

US123879092025
Low Frequency RF Generator and Associated Electrostatic Chuck
Lam Research Corporation
0 cites
US123621592025
Systems and Methods for Controlling a Plasma Sheath Characteristic
Lam Research Corporation
0 cites
US123548402025
Systems and Methods for Optimizing Power Delivery to an Electrode of a Plasma Chamber
Lam Research Corporation
0 cites
US123409892025
Electrostatic Edge Ring Mounting System for Substrate Processing
Lam Research Corporation
0 cites
US123082112025
Systems and Methods for Use of Low Frequency Harmonics in Bias Radiofrequency Supply to Control Uniformity of Plasma Process Results Across Substrate
Lam Research Corporation
0 cites
US122665052025
Systems and Methods for Using Binning to Increase Power During a Low Frequency Cycle
Lam Research Corporation
0 cites
US121658442024
Uniformity Control Circuit for Impedance Match
Lam Research Corporation
0 cites
US121318862024
Systems and Methods for Extracting Process Control Information from Radiofrequency Supply System of Plasma Processing System
Lam Research Corporation
0 cites
US120805182024
Impedance Match with an Elongated RF Strap
Lam Research Corporation
0 cites
US119357262024
High Speed Synchronization of Plasma Source/bias Power Delivery
MKS Instruments, Inc.
0 cites
US119357302024
Systems and Methods for Cleaning an Edge Ring Pocket
Lam Research Corporation
0 cites
US119086602024
Systems and Methods for Optimizing Power Delivery to an Electrode of a Plasma Chamber
Lam Research Corporation
0 cites