Patents/Inventors

Felix Kozakevich

Sunnyvale, CAUS5 patents

5 Patents

US125422572026
Minimizing Reflected Power in a Tunable Edge Sheath System
Lam Research Corporation
0 cites
US124760822025
Radiofrequency Signal Filter Arrangement for Plasma Processing System
Lam Research Corporation
0 cites
US122550522025
Process Control for Ion Energy Delivery Using Multiple Generators and Phase Control
Lam Research Corporation
0 cites
US121835442024
Tuning Voltage Setpoint in a Pulsed RF Signal for a Tunable Edge Sheath System
Lam Research Corporation
0 cites
US116519912023
Electrostatic Chuck Design for Cooling-gas Light-up Prevention
Lam Research Corporation
0 cites