Patents/Inventors

Fedir Viktorovych Teplyuk

Lowell, MAUS1 patent

2 Patents

US122898202025
Method and Apparatus for Impedance Matching in a Power Delivery System for Remote Plasma Generation
MKS Instruments, Inc.
0 cites
US119568852024
Method and Apparatus for Impedance Matching in a Power Delivery System for Remote Plasma Generation
MKS Instruments, Inc.
0 cites