3 Patents
- US118517602023PECVD Deposition System for Deposition on Selective Side of the Substrate
Lam Research Corporation
0 cites - US117252832023PECVD Deposition System for Deposition on Selective Side of the Substrate
Lam Research Corporation
0 cites - US116742262023Separation of Plasma Suppression and Wafer Edge to Improve Edge Film Thickness Uniformity
Lam Research Corporation
0 cites