Patents/Inventors

Evgenia Kurganova

NijmegenNL7 patents

8 Patents

US123994282025
Method and Apparatus for Forming a Patterned Layer of Material
ASML NETHERLANDS B.V.
0 cites
US123259112025
Method and Apparatus for Forming a Patterned Layer of Material
ASML NETHERLANDS B.V.
0 cites
US121177262024
Pellicle and Pellicle Assembly
ASML NETHERLANDS B.V.
0 cites
US120726202024
Method of Manufacturing a Membrane Assembly
ASML NETHERLANDS B.V.
0 cites
US119716542024
Metal-silicide-nitridation for Stress Reduction
ASML NETHERLANDS B.V.
0 cites
US119472562024
Simultaneous Double-side Coating of Multilayer Graphene Pellicle by Local Thermal Processing
ASML NETHERLANDS B.V.
0 cites
US117549182023
Pellicle and Pellicle Assembly
ASML NETHERLANDS B.V.
0 cites
US116869972023
Metal-silicide-nitridation for Stress Reduction
ASML NETHERLANDS B.V.
0 cites