Patents/Inventors

Eunhee Jeang

Paju-siKR15 patents

10 Patents

US126191562026
EUV Light Uniformity Control Apparatus, EUV Exposure Equipment Including the Same, and Method of Controlling EUV Light Uniformity by Using the Control Apparatus
Samsung Electronics Co., Ltd.
0 cites
US125387582026
Substrate Inspection System and Method of Manufacturing Semiconductor Device Using Substrate Inspection System
Samsung Electronics Co., Ltd.
0 cites
US124875322025
EUV Collector Inspection Apparatus and Inspection Method
Samsung Electronics Co., Ltd.
0 cites
US122986712025
Illumination Correction Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122242142025
Method of Fabricating a Semiconductor Device
Samsung Electronics Co., Ltd.
0 cites
US119962702024
Wafer Processing Apparatus
Samsung Electronics Co., Ltd.
0 cites
US119553872024
Method of Fabricating a Semiconductor Device
Samsung Electronics Co., Ltd.
0 cites
US119468092024
Polarization Measuring Device and Method of Fabricating Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US118239612023
Substrate Inspection System and Method of Manufacturing Semiconductor Device Using Substrate Inspection System
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117156282023
Method of Forming Plasma Processing Apparatus, Related Apparatus, and Method of Forming Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites