Patents/Inventors

Eugen Foca

EllwangenDE7 patents

8 Patents

US125575882026
Methods of Cross-section Imaging of an Inspection Volume in a Wafer
Carl Zeiss SMT GmbH
0 cites
US122938952025
Charged Particle Beam System, Method of Operating a Charged Particle Beam System, Method of Recording a Plurality of Images and Computer Programs for Executing the Methods
Carl Zeiss SMT GmbH
0 cites
US122887052025
FIB-SEM 3D Tomography for Measuring Shape Deviations of HAR Structures
Carl Zeiss SMT GmbH
0 cites
US122887062025
Parameterizing X-ray Scattering Measurement Using Slice-and-image Tomographic Imaging of Semiconductor Structures
Carl Zeiss SMT GmbH
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US122835042025
Contact Area Size Determination Between 3D Structures in an Integrated Semiconductor Sample
Carl Zeiss SMT GmbH
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US120459692024
Automated Root Cause Analysis for Defect Detection During Fabrication Processes of Semiconductor Structures
Carl Zeiss SMT GmbH
0 cites
US119159082024
Method for Measuring a Sample and Microscope Implementing the Method
Carl Zeiss SMT GmbH
0 cites
US118107492023
Charged Particle Beam System, Method of Operating a Charged Particle Beam System, Method of Recording a Plurality of Images and Computer Programs for Executing the Methods
Carl Zeiss SMT GmbH
0 cites