Patents/Inventors

Erwin Slot

ZoetermeerNL3 patents

4 Patents

US123945892025
Charged Particle Device, Detector, and Methods
ASML NETHERLANDS B.V.
0 cites
USRE0499522024
Beam Grid Layout
ASML Netherlands B.V.
0 cites
USRE0497322023
Charged Particle Lithography System with Alignment Sensor and Beam Measurement Sensor
ASML Netherlands B.V.
0 cites
USRE0496022023
Lithography System, Sensor and Measuring Method
ASML Netherlands B.V.
0 cites