Patents/Inventors

Erwin Paul Smakman

EindhovenNL7 patents

8 Patents

US125000632025
Method and Apparatus for Inspection
ASML NETHERLANDS B.V.
0 cites
US123139802025
Inspection System, Lithographic Apparatus, and Inspection Method
ASML NETHERLANDS B.V.
0 cites
US121658362024
Systems and Methods of Profiling Charged-particle Beams
ASML Netherlands B.V.
0 cites
US119423022024
Pulsed Charged-particle Beam System
ASML Netherlands B.V.
0 cites
US118813742024
Apparatus for and Method of Controlling an Energy Spread of a Charged-particle Beam
ASML Netherlands B.V.
0 cites
US118759662024
Method and Apparatus for Inspection
ASML NETHERLANDS B.V.
0 cites
US117911322023
Aperture Array with Integrated Current Measurement
ASML Netherlands B.V.
0 cites
US117477382023
Determining the Combination of Patterns to Be Applied to a Substrate in a Lithography Step
ASML NETHERLANDS B.V.
0 cites