Erik Henri Adriaan Delvigne

3 Patents

• US117823492023

  Methods of Determining Corrections for a Patterning Process, Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus

  ASML NETHERLANDS B.V.

  0 cites
• US117748622023

  Method of Obtaining Measurements, Apparatus for Performing a Process Step, and Metrology Apparatus

  ASML NETHERLANDS B.V.

  0 cites
• US115927532023

  Methods of Determining Corrections for a Patterning Process, Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus

  ASML Netherlands B.V.

  0 cites