Erik Achilles Abegg

4 Patents

• US124746292025

  Membrane for EUV Lithography

  ASML NETHERLANDS B.V.

  0 cites
• US122986632025

  Method of Manufacturing a Pellicle for a Lithographic Apparatus, a Pellicle for a Lithographic Apparatus, a Lithographic Apparatus, a Device Manufacturing Method, an Apparatus for Processing a Pellicle, and a Method for Processing a Pellicle

  ASML NETHERLANDS B.V.

  0 cites
• US120667582024

  Pellicle and Pellicle Assembly

  ASML HOLDING N.V.

  0 cites
• US117622812023

  Membrane for EUV Lithography

  ASML NETHERLANDS B.V.

  0 cites