10 Patents
- US124127362025Methods and Systems for Managing Byproduct Material Accumulation During Plasma-based Semiconductor Wafer Fabrication Process
Lam Research Corporation
0 cites - US124068522025Profile Optimization for High Aspect Ratio Memory Using an Etch Front Metal Catalyst
Lam Research Corporation
0 cites - 0 cites
- US122550522025Process Control for Ion Energy Delivery Using Multiple Generators and Phase Control
Lam Research Corporation
0 cites - US122495142025Carbon Based Depositions Used for Critical Dimension Control During High Aspect Ratio Feature Etches and for Forming Protective Layers
Lam Research Corporation
0 cites - US122179722025Multi-state Pulsing for Achieving a Balance Between Bow Control and Mask Selectivity
Lam Research Corporation
0 cites - US121889602025Active Noise Isolation for Tunneling Applications (ANITA)
The Penn State Research Foundation
0 cites - 0 cites
- 0 cites
- 0 cites