Patents/Inventors

Eric Eva

AalenDE2 patents

3 Patents

US121177312024
Method for Producing a Mirror of a Microlithographic Projection Exposure Apparatus
CARL ZEISS SMT GmbH
0 cites
US119875212024
Substrate for a Reflective Optical Element
CARL ZEISS SMT GmbH
0 cites
US118745252024
Optical Element and Lithography System
Carl Zeiss SMT GmbH
0 cites