Patents/Inventors

Eric A. Pape

Campbell, CAUS4 patents

5 Patents

US123879642025
Matched Tcr Joule Heater Designs for Electrostatic Chucks
Lam Research Corporation
0 cites
US122494902025
Single Crystal Metal Oxide Plasma Chamber Component
Lam Research Corporation
0 cites
US120740492024
Permanent Secondary Erosion Containment for Electrostatic Chuck Bonds
Lam Research Corporation
0 cites
US120209602024
Determining and Controlling Substrate Temperature During Substrate Processing
Lam Research Corporation
0 cites
US117911892023
Reflectometer to Monitor Substrate Movement
Lam Research Corporation
0 cites