Patents/Inventors

Eric A. Hudson

Berkeley, CAUS3 patents

4 Patents

US124889922025
High Aspect Ratio Dielectric Etch with Chlorine
Lam Research Corporation
0 cites
US124790042025
Selective Attachment to Enhance Sio 2 :sin X Etch Selectivity
Lam Research Corporation
0 cites
US124354122025
High Density, Modulus, and Hardness Amorphous Carbon Films at Low Pressure
Lam Research Corporation
0 cites
US123548802025
High Aspect Ratio Etch with Infinite Selectivity
Lam Research Corporation
0 cites