Patents/Inventors

Engelbertus Antonius Fransiscus Van Der Pasch

OirschotNL7 patents

7 Patents

US125911792026
Metrology Apparatus
ASML Netherlands B.V.
0 cites
US122478832025
Wavelength Tracking System, Method to Calibrate a Wavelength Tracking System, Lithographic Apparatus, Method to Determine an Absolute Position of a Movable Object, and Interferometer System
ASML Netherlands B.V.
0 cites
US121471672024
Imprint Apparatus with Movable Stages
ASML Netherlands B.V.
0 cites
US119407392024
Metrology Apparatus
ASML Netherlands B.V.
0 cites
US119143082024
Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US117195292023
Interferometer System, Method of Determining a Mode Hop of a Laser Source of an Interferometer System, Method of Determining a Position of a Movable Object, and Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US116095032023
Lithographic Apparatus
ASML Netherlands B.V.
0 cites