Eng Sheng Peh

5 Patents

• US124630752025

  Cathode Assembly for Integration of Embedded Electrostatic Chuck (ESC)

  Applied Materials, Inc.

  0 cites
• US124379992025

  Methods and Apparatus for Mask Patterning Debris Removal

  APPLIED MATERIALS, Inc.

  0 cites
• US120681592024

  Methods and Apparatus for Mask Patterning Debris Removal

  APPLIED MATERIALS, Inc.

  0 cites
• US117215832023

  Mainframe-less Wafer Transfer Platform with Linear Transfer System for Wafer Processing Modules

  Applied Materials, Inc.

  0 cites
• US116004922023

  Electrostatic Chuck with Reduced Current Leakage for Hybrid Laser Scribing and Plasma Etch Wafer Singulation Process

  Applied Materials, Inc.

  0 cites