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Inventors
Emanuel I. Cooper
Scarsdale, NY
US
3 patents
3 Patents
US11978622
2024
Aqueous and Semi-aqueous Cleaners for the Removal of Post-etch Residues with Tungsten and Cobalt Compatibility
ENTEGRIS, Inc.
0 cites
US11788007
2023
Method for Removing Hard Masks
ENTEGRIS, Inc.
0 cites
US11697767
2023
Silicon Nitride Etching Composition and Method
ENTEGRIS, Inc.
0 cites