Patents/Inventors

Elmar Platzgummer

ViennaAT3 patents

4 Patents

US126146952026
Multi-beam Pattern Definition Device
IMS Nanofabrication GmbH
0 cites
US121547562024
Beam Pattern Device Having Beam Absorber Structure
IMS Nanofabrication GmbH
0 cites
US120401572024
Pattern Data Processing for Programmable Direct-write Apparatus
IMS Nanofabrication GmbH
0 cites
US115690642023
Method for Irradiating a Target Using Restricted Placement Grids
IMS Nanofabrication GmbH
0 cites