Patents/Inventors

Eller Y. Juco

Tualatin, ORUS6 patents

6 Patents

US125867572026
Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Lam Research Corporation
0 cites
US123946012025
Impedance Transformation in Radio-frequency-assisted Plasma Generation
Lam Research Corporation
0 cites
US121369382024
Closed-loop Multiple-output Radio Frequency (RF) Matching
Lam Research Corporation
0 cites
US119842982024
Impedance Transformation in Radio-frequency-assisted Plasma Generation
Lam Research Corporation
0 cites
US115943972023
Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Lam Research Corporation
0 cites
US115574602023
Radio Frequency (RF) Signal Source Supplying RF Plasma Generator and Remote Plasma Generator
Lam Research Corporation
0 cites