Patents/Inventors

Elisabeth Corinne Rodenburg

HeezeNL4 patents

5 Patents

US123668082025
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, and Method of Manufacturing a Substrate Holder
ASML NETHERLANDS B.V.
0 cites
US123531392025
Substrate Holder and Method of Manufacturing a Substrate Holder
ASML NETHERLANDS B.V.
0 cites
US119602132024
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, and Method of Manufacturing a Substrate Holder
ASML NETHERLANDS B.V.
0 cites
US117549292023
Substrate Holder and Method of Manufacturing a Substrate Holder
ASML NETHERLANDS B.V.
0 cites
US116284982023
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, and Method of Manufacturing a Substrate Holder
ASML NETHERLANDS B.V.
0 cites