Patents/Inventors

Ekaterina Mikhaylichenko

San Jose, CAUS4 patents

5 Patents

US121989442025
Substrate Handling in a Modular Polishing System with Single Substrate Cleaning Chambers
Applied Materials, Inc.
0 cites
US119423192024
Pad Carrier for Horizontal Pre-clean Module
APPLIED MATERIALS, Inc.
0 cites
US118199762023
Spray System for Slurry Reduction During Chemical Mechanical Polishing (cmp)
Applied Materials, Inc.
0 cites
US117640692023
Asymmetry Correction via Variable Relative Velocity of a Wafer
Applied Materials, Inc.
0 cites
US117215632023
Non-contact Clean Module
Applied Materials, Inc.
0 cites