Patents/Inventors

Eitan Hajaj

Tel AvivIL8 patents

9 Patents

US121115802024
Optical Metrology Utilizing Short-wave Infrared Wavelengths
KLA Corporation
0 cites
US121054142024
Targets for Diffraction-based Overlay Error Metrology
KLA Corporation
0 cites
US120558592024
Overlay Mark Design for Electron Beam Overlay
0 cites
US118625242024
Overlay Mark Design for Electron Beam Overlay
0 cites
US117969252023
Scanning Overlay Metrology Using Overlay Targets Having Multiple Spatial Frequencies
KLA Corporation
0 cites
US117264102023
Multi-resolution Overlay Metrology Targets
KLA Corporation
0 cites
US117200312023
Overlay Design for Electron Beam and Scatterometry Overlay Measurements
KLA Corporation
0 cites
US117037672023
Overlay Mark Design for Electron Beam Overlay
0 cites
US116769092023
Metrology Targets for High Topography Semiconductor Stacks
KLA Corporation
0 cites