Patents/Inventors

Einstein Noel Abarra

TokyoJP13 patents

13 Patents

US125538452026
Holder Temperature Detection Method, Holder Monitoring Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US124697232025
Substrate Processing Apparatus and Abnormality Detection Method
Tokyo Electron Limited
0 cites
US124379762025
Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US124009632025
Conductive Superlattice Structures and Methods of Forming the Same
TOKYO ELECTRON LIMITED
0 cites
US122350452025
Magnetic Annealing Equipment and Method
TOKYO ELECTRON LIMITED
0 cites
US121702172024
Substrate Processing Apparatus and Abnormality Detection Method
Tokyo Electron Limited
0 cites
US120026672024
Sputtering Apparatus and Method of Controlling Sputtering Apparatus
Tokyo Electron Limited
0 cites
US119396652024
Film Thickness Measuring Apparatus and Film Thickness Measuring Method, and Film Forming System and Film Forming Method
TOKYO ELECTRON LIMTED
0 cites
US118517502023
Apparatus and Method for Performing Sputtering Process
Tokyo Electron Limited
0 cites
US118238802023
Target Structure and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117421902023
Sputtering Apparatus and Film Forming Method
Tokyo Electron Limited
0 cites
US117156712023
Film Forming System, Magnetization Characteristic Measuring Device, and Film Forming Method
TOKYO ELECTRON LIMITED
0 cites
US115811712023
Cathode Unit and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites