Patents/Inventors

Eiki Kamata

NirasakiJP17 patents

18 Patents

US126146992026
Plasma Source and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US124445742025
Plasma Processing Apparatus, and Plasma Processing Method
Tokyo Electron Limited
0 cites
US124127322025
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US124070782025
Tuner, and Impedance Matching Method
Tokyo Electron Limited
0 cites
US123385322025
Plasma Processing Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US123157002025
Plasma Processing Apparatus and Ceiling Wall
TOKYO ELECTRON LIMITED
0 cites
US122834652025
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US122437182025
Plasma Processing Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US122371572025
Plasma Measurement Method
Tokyo Electron Limited
0 cites
US121658462024
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US120464532024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119674852024
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US118878252024
Control Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118428862023
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117840852023
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117215282023
Plasma Processing Apparatus and Control Method
TOKYO ELECTRON LIMITED
0 cites
US117053102023
Plasma Probe Device, Plasma Processing Apparatus, and Control Method
TOKYO ELECTRON LIMITED
0 cites
US116004752023
Plasma Processing Apparatus and Control Method
TOKYO ELECTRON LIMITED
0 cites