Patents/Inventors

Eiichiro Shiba

HachiojiJP17 patents

9 Patents

US126046842026
Method and System for Mitigating Underlayer Damage During Formation of Patterned Structures
ASM IP Holding B.V.
0 cites
US124313542025
Silicon Nitride and Silicon Oxide Deposition Methods Using Fluorine Inhibitor
ASM IP Holding B.V.
0 cites
US122665402025
Method for Fabricating Layer Structure Having Target Topological Profile
ASM IP Holding B.V.
0 cites
US120984602024
Systems and Methods for Stabilizing Reaction Chamber Pressure
ASM IP Holding B.V.
0 cites
US121005972024
Method and System for Forming Patterned Structures Including Silicon Nitride
ASM IP Holding B.V.
0 cites
US119617412024
Method for Fabricating Layer Structure Having Target Topological Profile
ASM IP Holding B.V.
0 cites
US118279812023
Method of Depositing Material on Stepped Structure
ASM IP Holding B.V.
0 cites
US118210782023
Method for Forming Precoat Film and Method for Forming Silicon-containing Film
ASM IP Holding B.V.
0 cites
US116768122023
Method for Forming Silicon Nitride Film Selectively on Top/bottom Portions
ASM IP Holding B.V.
0 cites