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Inventors
Egbert Lenderink
Waalre
NL
3 patents
3 Patents
US12474629
2025
Membrane for EUV Lithography
ASML NETHERLANDS B.V.
0 cites
US11762281
2023
Membrane for EUV Lithography
ASML NETHERLANDS B.V.
0 cites
US11561478
2023
Determining Subset of Components of an Optical Characteristic of Patterning Apparatus
ASML Netherlands B.V.
0 cites