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Inventors
Edwin Cornelis Kadijk
Eindhoven
NL
3 patents
4 Patents
US12354891
2025
Particle Beam Inspection Apparatus
ASML Netherlands B.V.
0 cites
US12117721
2024
Lithographic Apparatus and Device Manufacturing Method
ASML Netherlands B.V.
0 cites
US12051607
2024
Substrate Positioning Device with Remote Temperature Sensor
ASML NETHERLANDS B.V.
0 cites
US11942340
2024
Particle Beam Inspection Apparatus
ASML Netherlands B.V.
0 cites