Edward P. Hammond, IV

7 Patents

• US125312062026

  Electrostatic Chuck with Multiple Radio Frequency Meshes to Control Plasma Uniformity

  APPLIED MATERIALS, Inc.

  0 cites
• US121365362024

  Electrostatic Chuck with Multiple Radio Frequency Meshes to Control Plasma Uniformity

  APPLIED MATERIALS, Inc.

  0 cites
• US121365492024

  Plasma-enhanced Chemical Vapor Deposition of Carbon Hard-mask

  APPLIED MATERIALS, Inc.

  0 cites
• US119086622024

  Device and Method for Tuning Plasma Distribution Using Phase Control

  Applied Materials, Inc.

  0 cites
• US116268532023

  RF Power Delivery Architecture with Switchable Match and Frequency Tuning

  Applied Materials, Inc.

  0 cites
• US115690722023

  RF Grounding Configuration for Pedestals

  APPLIED MATERIALS, Inc.

  0 cites
• US115453762023

  Plasma Parameters and Skew Characterization by High Speed Imaging

  Applied Materials, Inc.

  0 cites