3 Patents
- US124976872025Ion Implantation System and Method for Implanting Aluminum Using Non-fluorine-containing Halide Species or Molecules
Axcelis Technologies, Inc.
0 cites - US120515612024Fluorine Based Molecular Co-gas When Running Dimethylaluminum Chloride as a Source Material to Generate an Aluminum Ion Beam
Axcelis Technologies, Inc.
0 cites - US116995652023Fluorine Based Molecular Co-gas When Running Dimethylaluminum Chloride as a Source Material to Generate an Aluminum Ion Beam
Axcelis Technologies, Inc.
0 cites