4 Patents
- US123082162025Mechanical Suppression of Parasitic Plasma in Substrate Processing Chamber
Lam Research Corporation
0 cites - US118624352024Mechanical Suppression of Parasitic Plasma in Substrate Processing Chamber
Lam Research Corporation
0 cites - US117252822023Suppression of Parasitic Deposition in a Substrate Processing System by Suppressing Precursor Flow and Plasma Outside of Substrate Region
Novellus Systems, Inc.
0 cites - US116211502023Mechanical Suppression of Parasitic Plasma in Substrate Processing Chamber
Lam Research Corporation
0 cites