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Edward Augustyniak
Tualatin, OR
US
1 patent
2 Patents
US12143087
2024
Combiner and Distributor for Adjusting Impedances or Power Across Multiple Plasma Processing Stations
LAM RESEARCH CORPORATION
0 cites
US11823928
2023
Control of Wafer Bow in Multiple Stations
Lam Research Corporation
0 cites