Patents/Inventors

Easwar Srinivasan

Portland, ORUS2 patents

3 Patents

US122093102025
Concentration Control Using a Bubbler
Lam Research Corporation
0 cites
US120625542024
Progressive Heating of Components of Substrate Processing Systems Using TCR Element-based Heaters
LAM RESEARCH CORPORATION
0 cites
US119553662024
Pad Raising Mechanism in Wafer Positioning Pedestal for Semiconductor Processing
Lam Research Corporation
0 cites