Duygu Akbulut

3 Patents

• US125911792026

  Metrology Apparatus

  ASML Netherlands B.V.

  0 cites
• US119407392024

  Metrology Apparatus

  ASML Netherlands B.V.

  0 cites
• US119278912024

  Apparatus and Methods for Determining the Position of a Target Structure on a Substrate

  ASML Netherlands B.V.

  0 cites