Patents/Inventors

Dustin Zachary Austin

Tigard, ORUS8 patents

7 Patents

USD11242352026
Showerhead
LAM RESEARCH CORPORATION
0 cites
US125989302026
Conformal Thermal CVD with Controlled Film Properties and High Deposition Rate
Lam Research Corporation
0 cites
US124736332025
Plasma Enhanced Atomic Layer Deposition of Silicon-containing Films
Lam Research Corporation
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US124179432025
Reducing Intralevel Capacitance in Semiconductor Devices
Lam Research Corporation
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US123728722025
Extreme Ultraviolet (EUV) Lithography Using an Intervening Layer or a Multi-layer Stack with Varying Mean Free Paths for Secondary Electron Generation
LAM RESEARCH CORPORATION
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US119159232024
Method to Clean Sno 2 Film from Chamber
Lam Research Corporation
0 cites
US117178662023
Etching Metal-oxide and Protecting Chamber Components
Lam Research Corporation
0 cites