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Inventors
Dukhyun Son
Cheonan-si
KR
5 patents
6 Patents
US12266512
2025
Plasma Processing Apparatus
SEMES CO., Ltd.
0 cites
US12148641
2024
Container and Substrate Treating Apparatus
SEMES CO., Ltd.
0 cites
US12087560
2024
Apparatus and Method for Treating Substrate
SEMES CO., Ltd.
0 cites
US11756817
2023
Apparatus and Method for Processing Substrate
SEMES CO., Ltd.
0 cites
US11699599
2023
Substrate Transfer Apparatus and Substrate Treating Apparatus
Semes Co., Ltd.
0 cites
US11569110
2023
Buffer Unit, and Apparatus and Method for Treating Substrate with the Unit
SEMES CO., Ltd.
0 cites